data sheet the new generation turbo pump with agilent floating suspension the agilent twistorr 84 fs turbomolecular high-vacuum pump combines twistorr drag stage technology and agilent floating suspension to provide high performance, reliability, and economy. twistorr drag stages create high compression ratios for light gases such as hydrogen and helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. this technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. the agilent floating suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stability over time. the unique bearing and dry lubrication in the twistorr 704 fs eliminate oil and maintenance, and permit operation of the pump in any orientation. available with onboard or rack controllers. agilent twistorr 84 fs
2 3 ordering information pumps configuration options twistorr 84 fs iso 63 x3502-64000 twistorr 84 fs kf 40 x3502-64001 twistorr 84 fs cff 4.5 x3502-64002 twistorr 84 fs cff 2.75 x3502-64003 controllers part numbers twistorr 84 fs ag rack controller rs232/485 x3508-64001 twistorr 84 fs ag rack controller profibus x3508-64002 twistorr 84 fs onboard controller 110/220v x3509-64000 twistorr 84 fs onboard controller 24v x3509-64001 twistorr 84 fs pcb controller x3510-64000 cables part numbers mains cable nema plug 3 m long 9699958 mains cable eu plug 3 m long 9699957 serial cable and t-plus software 9699883 pcb cable 9699869 pump extension cable (3 m) 9699942 extension cable 969-9942m007 ( 5 m ) 969-9942m006 ( 10 m ) 969-9942m005 ( 15 m ) 969-9942m004 ( 20 m ) inlet screen part numbers inlet screen iso 63 x3502-68001 inlet screen cff 4.5 x3502-68000 inlet screen, kf 40 969-9309 inlet screen cff 2.75 969-9328 cooling part numbers metal water cooling kit x3502-68002 plastic water cooling kit x3502-68003 metal water cooling kit x3502-68002 plastic water cooling kit x3502-68003 air cooling kit (0,5 m cable) 9699290 air cooling kit extension cable (5 m) 9699940 vibration isolator part numbers vibration isolator iso 63 969-9375 vibration isolator cff 4.5 969-9376 venting part numbers vent valve n.o. 0.5 mm orifice (0.5 m cable) 9699844 vent valve extension cable 9699941 (5 m) 969-9941m003 (10 m) 969-9941m001 (15 m) 969-9941m005 (20 m) vent screw m5 x3502-68005 vent adapter kit m5-m8 X1699-64039 purge part numbers purge screw x3502-68004 purge valve 10 sccm nw16kf - m12 9699834 purge valve 10 sccm ? swagelok - m12 9699108 purge valve 20 sccm nw16kf - m12 969-9241 purge valve 20 sccm ? swagelok - m12 969-9242 purge valve 10 sccm ? swagelok - ? swagelok 969-9232 purge valve 20 sccm ? swagelok - ? swagelok 969-9236 mounting part numbers controller side mounting bracket x3502-68006 cff4.5 mounting kit x3502-68007 metric screws kit x3502-68008 american screws kit x3502-68009 active gauges part numbers frg 700 full range gauge pvg 500 pirani vacuum gauge pcg 750 pirani capacitance gauge cdg-500 capacitance diaphragm gauge ask agilent for details pumping speed compression ratio technical specification pumping speed kf40 cff 2.75 iso 63 cff 4.5 n 2 he h 2 ar 49 l/s 38 l/s 36 l/s 44 56 l/s 46 l/s 40 l/s 57 l/s 67 l/s 63 l/s 53 l/s 66 l/s 67 63 53 66 gas throughput at full rotational speed (with recomm. forepump) air cooling (35 c) water cooling (25 c, 65 l/h) n 2 ar 100 sccm 70 sccm 100 sccm 70 sccm compression ratio and foreline tolerance n 2 he h 2 ar 1.0 x 10 11 2.0 x 10 6 5.0 x 10 4 > 1.0 x 10 11 >14 mbar >12 mbar >4 mbar >14 mbar base pressure with recom- mended forepump (5 m 3 /h) < 5 x 10-10 mbar (< 3.75 x 10-10 torr) inlet flange cff 4.5 od cff 2.75 od iso 63 kf 40 foreline flange kf16 nw rotational speed 81000 rpm (1350 hz driving frequency) start-up time < 2 minutes technical specification recommended forepump mechanical: agilent ds 40m / ds 102 dry pump: agilent idp-3/idp-7 operating position any oper. ambient temperature +5 c to +35 c rel. humidity of air 0 - 90 % (not condensing) bakeout temperature 80 c for iso (120 c for cff) at inlet flange lubricant permanent lubrication cooling requirements forced air (5- 35 c ambient temperature) air cooling air flow temperature +5 c to +35 c water cooling cooling water temperature: +15 c to +25 c minimum flow: 65 l/h (0.30 gpm) pressure: 2 to 4 bar (45 to 75 psi) noise pressure level (at 1 mt at full speed) 40 db(a) * storage temperature -40 c to +70 c max altitude 3000 m weight kg (lbs) pump iso 63 kg 2.05 pump cff 4.5 kg 3.50 pump cff 2.75 kg 3.34 pump kf 40 kg 2.37 conformity to norms ce, c-csa-us, rohs compliant as per 2011/65/ue outline drawing dimensions: millimeters [inches] technical specification foreline flange kf16 electrical connect or vent screw iso 63k cff 4"1/2 foreline flange kf16 vent screw electrical connect or 97 [3.82] 61.53 [2.42] 148.27 [5.84] 111 .34 [4.38] 105.39 [4.15] 11 5.72 [4.56] 25 59 . 2 5 [2.33] 62 . 4 [2.46 ] 20 25 59 . 2 5 [2.33] 62 . 4 [2.46 ] 20 122.02 [4.80] 154.57 [6.09] 111 .69 [4.40] 97 [3.82] 67.64 [2.66] ? ? 11 7.64 [4.63] *average value 4 db(a) std deviation inlet pressure (mbar) pumping speed (l/s) 0 10 20 30 40 50 60 70 80 1,e-09 1,e-08 1,e-07 1,e-06 1,e-05 1,e-04 1,e-03 1,e-02 1,e-01 1,e+00 hydrogen helium nitrogen argon foreline pressure (mbar) compression ratio 1,e+00 1,e+01 1,e+02 1,e+03 1,e+04 1,e+05 1,e+06 1,e+07 1,e+08 1,e+09 1,e+10 1,e+11 1,e+12 1,e-3 1,e-2 1,e-1 1,e+0 1,e+1 1,e+2 hydrogen helium nitrogen argon 3d drawings available for download
www.agilent.com/chem/vacuum united states agilent technologies 121 hartwell avenue, lexington ma 02421, usa tel: +1 781 861 7200 toll free: +1 800 882 7426 vpl-customercare@agilent.com e urope and other countries agilent technologies italia spa via f.lli varian 54, 10040 leini, (torino), italy tel: +39 011 9979 111 toll free: 00 800 234 234 00 vpt-customercare@agilent.com this information is subject to change without notice. ? agilent technologies, inc. 2017 printed in the usa, october, 2017
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